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Nanopatterning by dual-ion-beam sputtering

Authors
Joe, M.Choi, C.Kahng, B.Kim, J. -S.
Issue Date
Dec-2007
Publisher
AMER INST PHYSICS
Citation
APPLIED PHYSICS LETTERS, v.91, no.23
Journal Title
APPLIED PHYSICS LETTERS
Volume
91
Number
23
URI
https://scholarworks.sookmyung.ac.kr/handle/2020.sw.sookmyung/14594
DOI
10.1063/1.2816236
ISSN
0003-6951
Abstract
We studied the development of ordered nanopatterns during dual-ion-beam sputtering (DIBS) of Au(001) in which two ion beams that cross perpendicular to each other at their azimuth are incident on the surface at a grazing angle. In the erosion (diffusion) regime, a square-symmetric two-dimensional (2D) pattern of nanodots (holes) is formed. The 2D pattern is achieved only when the two beams are balanced in the erosion regime. In the diffusion regime, no such condition is required. The observations cannot be explained by the Kuramoto-Sivashinsky (KS) equation derived from Sigmund theory with two ion beams. (c) 2007 American Institute of Physics.
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