Phonon conduction in silicon nanobeams
- Authors
- Park, Woosung; Shin, Dongsuk D.; Kim, Soo Jin; Katz, Joseph S.; Park, Joonsuk; Ahn, Chae Hyuck; Kodama, Takashi; Asheghi, Mehdi; Kenny, Thomas W.; Goodson, Kenneth E.
- Issue Date
- May-2017
- Publisher
- AMER INST PHYSICS
- Citation
- APPLIED PHYSICS LETTERS, v.110, no.21
- Journal Title
- APPLIED PHYSICS LETTERS
- Volume
- 110
- Number
- 21
- URI
- https://scholarworks.sookmyung.ac.kr/handle/2020.sw.sookmyung/146990
- DOI
- 10.1063/1.4983790
- ISSN
- 0003-6951
1077-3118
- Abstract
- Despite extensive studies on thermal transport in thin silicon films, there has been little work studying the thermal conductivity of single-crystal rectangular, cross-sectional nanobeams that are commonly used in many applications such as nanoelectronics (FinFETs), nano-electromechanical systems, and nanophotonics. Here, we report experimental data on the thermal conductivity of silicon nanobeams of a thickness of similar to 78 nm and widths of similar to 65 nm, 170 nm, 270 nm, 470 nm, and 970 nm. The experimental data agree well (within similar to 9%) with the predictions of a thermal conductivity model that uses a combination of bulk mean free paths obtained from ab initio calculations and a suppression function derived from the kinetic theory. This work quantifies the impact of nanobeam aspect ratios on thermal transport and establishes a criterion to differentiate between thin films and beams in studying thermal transport. The thermal conductivity of a 78 nm similar to 65 nm nanobeam is similar to 32 W m(-1) K-1, which is roughly a factor of two smaller than that of a 78 nm thick film. Published by AIP Publishing.
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