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Wafer-Scale van der Waals Heterostructures with Ultraclean Interfaces via the Aid of Viscoelastic Polymer

Authors
Boandoh, StephenAgyapong-Fordjour, Frederick Osei-TutuChoi, Soo HoLee, Joo SongPark, Ji-HoonKo, HayoungHan, GyeongtakYun, Seok JoonPark, SehwanKim, Young-MinYang, WoochulLee, Young HeeKim, Soo MinKim, Ki Kang
Issue Date
Jan-2019
Publisher
AMER CHEMICAL SOC
Keywords
van der Waals heterostructure; glass transition temperature; viscoelastic polymer support layer; conformal contact; ultraclean interface
Citation
ACS APPLIED MATERIALS & INTERFACES, v.11, no.1, pp 1579 - 1586
Pages
8
Journal Title
ACS APPLIED MATERIALS & INTERFACES
Volume
11
Number
1
Start Page
1579
End Page
1586
URI
https://scholarworks.sookmyung.ac.kr/handle/2020.sw.sookmyung/1911
DOI
10.1021/acsami.8b16261
ISSN
1944-8244
1944-8252
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