Nam, J.H., Oh, Y., Byun, E., Joo, E., Jeong, S., Kim, E., Kim, B., Song, S.H.
ArticleIssue Date2021CitationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), v.2021-January, pp.720 - 723PublisherInstitute of Electrical and Electronics Engineers Inc.