Chemical bonding effect of Ge atoms on B diffusion in Si

  • Bang, Junhyeok
  • Kang, Joongoo
  • Lee, Woo-Jin
  • Chang, K. J.
  • Kim, Hanchul
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제목
Chemical bonding effect of Ge atoms on B diffusion in Si
저자
Bang, JunhyeokKang, JoongooLee, Woo-JinChang, K. J.Kim, Hanchul
DOI
10.1103/PhysRevB.76.064118
발행일
2007-08
저널명
Physical Review B - Condensed Matter and Materials Physics
76
6
페이지
64118 ~ 64118