Facile fabrication of 2-dimensional arrays of sub-10 nm single crystalline Si nanopillars using nanoparticle masks

  • Kim, Han Chul; 
  • Hong, Young-Kyu; 
  • Bahng, Jae Ho; 
  • Lee, Geunseop; 
  • Kim, Wondong; 
  • 외 5명
Citations

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Citations

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제목
Facile fabrication of 2-dimensional arrays of sub-10 nm single crystalline Si nanopillars using nanoparticle masks
저자
Kim, Han Chul; Hong, Young-Kyu; Bahng, Jae Ho; Lee, Geunseop; Kim, Wondong; Lee, Sekyung; Koo, Ja-Yong; Park, Jong-Il; Lee, Woo-Ram; Cheon, Jinwoo
DOI
10.1039/b310098g
발행일
2003-12
저널명
Chemical Communications
권
0
호
24
페이지
3034 ~ 3035