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Validity of Film-Thickness Estimates Based on Angle-Resolved X-ray Photoelectron Spectroscopy Using Various Inelastic Mean-Free-Path Formulae
- Lee, Hangil;
- Kim, Sehun;
- Lee, Dohyun;
- Hwang, Chanyong
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0초록
We investigated the thickness of Ag on a W(001) substrate and the native oxide on top of a alloy grown on Si(100) substrate. We used X-ray photoelectron spectroscopy to confirm the consistency of various inelastic mean-free-path formulae. Because the Ag/W(001) system is composed of four core levels (W 4, W 4, Ag 3 and Ag 3) and the / on Si(100) system is composed of three core levels (Si 2, Ge 2 and Ge 3), these systems are quite useful for checking the accuracy of various inelastic mean-free-path(IMFP) formulae with a variety of combinations between films and substrates. We found that the reported inelastic mean-free-path formulae were uncorrelated in our systems.
키워드
XPS; Mean-free-path
- 제목
- Validity of Film-Thickness Estimates Based on Angle-Resolved X-ray Photoelectron Spectroscopy Using Various Inelastic Mean-Free-Path Formulae
- 저자
- Lee, Hangil; Kim, Sehun; Lee, Dohyun; Hwang, Chanyong
- 발행일
- 2007-12
- 권
- 51
- 호
- 6
- 페이지
- 1915 ~ 1920