Validity of Film-Thickness Estimates Based on Angle-Resolved X-ray Photoelectron Spectroscopy Using Various Inelastic Mean-Free-Path Formulae
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초록

We investigated the thickness of Ag on a W(001) substrate and the native oxide on top of a alloy grown on Si(100) substrate. We used X-ray photoelectron spectroscopy to confirm the consistency of various inelastic mean-free-path formulae. Because the Ag/W(001) system is composed of four core levels (W 4, W 4, Ag 3 and Ag 3) and the / on Si(100) system is composed of three core levels (Si 2, Ge 2 and Ge 3), these systems are quite useful for checking the accuracy of various inelastic mean-free-path(IMFP) formulae with a variety of combinations between films and substrates. We found that the reported inelastic mean-free-path formulae were uncorrelated in our systems.

키워드

XPSMean-free-path
제목
Validity of Film-Thickness Estimates Based on Angle-Resolved X-ray Photoelectron Spectroscopy Using Various Inelastic Mean-Free-Path Formulae
저자
Lee, HangilKim, SehunLee, DohyunHwang, Chanyong
DOI
10.3938/jkps.51.1915
발행일
2007-12
저널명
Journal of the Korean Physical Society
51
6
페이지
1915 ~ 1920