Effects of polycrystallinity in nano patterning by ion-beam sputtering
  • Yoon, Sun Mi
  • Kim, J. -S.
  • Yoon, D.
  • Cheong, H.
  • Kim, Y.
  • 외 1명
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초록

Employing graphites with distinctly different mean grain sizes, we study the effects of polycrystallinity on the pattern formation by ion-beam sputtering. The grains influence the growth of the ripples in a highly anisotropic fashion; both the mean uninterrupted ripple length along the ridges and the surface width depend on the mean size of the grains, which is attributed to the large sputter yield at the grain boundary compared with that on the terrace. In contrast, the ripple wavelength does not depend on the mean size of the grains, indicating that the mass transport across the grain boundaries should efficiently proceed by both thermal diffusion and ion-induced processes. (C) 2014 AIP Publishing LLC.

키워드

AMORPHOUS-CARBONSURFACESBOMBARDMENTMORPHOLOGY
제목
Effects of polycrystallinity in nano patterning by ion-beam sputtering
저자
Yoon, Sun MiKim, J. -S.Yoon, D.Cheong, H.Kim, Y.Lee, H. H.
DOI
10.1063/1.4889976
발행일
2014-07
유형
Article
저널명
Journal of Applied Physics
116