Phonon conduction in silicon nanobeams
DC Field | Value | Language |
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dc.contributor.author | Park, Woosung | - |
dc.contributor.author | Shin, Dongsuk D. | - |
dc.contributor.author | Kim, Soo Jin | - |
dc.contributor.author | Katz, Joseph S. | - |
dc.contributor.author | Park, Joonsuk | - |
dc.contributor.author | Ahn, Chae Hyuck | - |
dc.contributor.author | Kodama, Takashi | - |
dc.contributor.author | Asheghi, Mehdi | - |
dc.contributor.author | Kenny, Thomas W. | - |
dc.contributor.author | Goodson, Kenneth E. | - |
dc.date.accessioned | 2022-04-19T09:44:58Z | - |
dc.date.available | 2022-04-19T09:44:58Z | - |
dc.date.issued | 2017-05 | - |
dc.identifier.issn | 0003-6951 | - |
dc.identifier.issn | 1077-3118 | - |
dc.identifier.uri | https://scholarworks.sookmyung.ac.kr/handle/2020.sw.sookmyung/146990 | - |
dc.description.abstract | Despite extensive studies on thermal transport in thin silicon films, there has been little work studying the thermal conductivity of single-crystal rectangular, cross-sectional nanobeams that are commonly used in many applications such as nanoelectronics (FinFETs), nano-electromechanical systems, and nanophotonics. Here, we report experimental data on the thermal conductivity of silicon nanobeams of a thickness of similar to 78 nm and widths of similar to 65 nm, 170 nm, 270 nm, 470 nm, and 970 nm. The experimental data agree well (within similar to 9%) with the predictions of a thermal conductivity model that uses a combination of bulk mean free paths obtained from ab initio calculations and a suppression function derived from the kinetic theory. This work quantifies the impact of nanobeam aspect ratios on thermal transport and establishes a criterion to differentiate between thin films and beams in studying thermal transport. The thermal conductivity of a 78 nm similar to 65 nm nanobeam is similar to 32 W m(-1) K-1, which is roughly a factor of two smaller than that of a 78 nm thick film. Published by AIP Publishing. | - |
dc.language | 영어 | - |
dc.language.iso | ENG | - |
dc.publisher | AMER INST PHYSICS | - |
dc.title | Phonon conduction in silicon nanobeams | - |
dc.type | Article | - |
dc.publisher.location | 미국 | - |
dc.identifier.doi | 10.1063/1.4983790 | - |
dc.identifier.scopusid | 2-s2.0-85019684392 | - |
dc.identifier.wosid | 000402320000033 | - |
dc.identifier.bibliographicCitation | APPLIED PHYSICS LETTERS, v.110, no.21 | - |
dc.citation.title | APPLIED PHYSICS LETTERS | - |
dc.citation.volume | 110 | - |
dc.citation.number | 21 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | sci | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.identifier.url | https://aip.scitation.org/doi/10.1063/1.4983790 | - |
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