Nam, JuHong; Oh, Youngju; Byun, Eunjeong; Joo, Eunseo; Jeong, Soryeong; Kim, Esther; Kim, Bongjun; Song, Seung Hyun
ArticleIssue Date2021CitationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), v.2021-January, pp 720 - 723PublisherInstitute of Electrical and Electronics Engineers Inc.