High temperature electrical conduction in nanoscale hafnia films under varying oxygen partial pressure
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Ko, Changhyun | - |
dc.contributor.author | Shandalov, Michael | - |
dc.contributor.author | McIntyre, Paul C. | - |
dc.contributor.author | Ramanathan, Shriram | - |
dc.date.accessioned | 2022-04-19T10:43:57Z | - |
dc.date.available | 2022-04-19T10:43:57Z | - |
dc.date.issued | 2010-08 | - |
dc.identifier.issn | 0003-6951 | - |
dc.identifier.issn | 1077-3118 | - |
dc.identifier.uri | https://scholarworks.sookmyung.ac.kr/handle/2020.sw.sookmyung/147899 | - |
dc.description.abstract | Point defect equilibration in nanocrystalline hafnium oxide thin films in the monoclinic (m-HfO(2)) phase was studied by electrochemical measurements performed under varying temperature and oxygen partial pressure (P(O2)) on films of 35-63 nm thickness on single crystal MgO and Al(2)O(3) substrates. The conductance varied as (P(O2))(n), where n is the in the range similar to+1/11 to similar to+1/14, at high P(O2). The increasing conductance with P(O2) suggests that the electronic conduction in the HfO(2) films is p-type and oxygen interstitials or hafnium vacancies, rather than oxygen vacancies, could be dominant charged point defects in nanocrystalline, undoped m-HfO(2) films. (C) 2010 American Institute of Physics. [doi: 10.1063/1.3482940] | - |
dc.language | 영어 | - |
dc.language.iso | ENG | - |
dc.publisher | American Institute of Physics | - |
dc.title | High temperature electrical conduction in nanoscale hafnia films under varying oxygen partial pressure | - |
dc.type | Article | - |
dc.publisher.location | 미국 | - |
dc.identifier.doi | 10.1063/1.3482940 | - |
dc.identifier.scopusid | 2-s2.0-77956213417 | - |
dc.identifier.wosid | 000281306500032 | - |
dc.identifier.bibliographicCitation | APPLIED PHYSICS LETTERS, v.97, no.8 | - |
dc.citation.title | APPLIED PHYSICS LETTERS | - |
dc.citation.volume | 97 | - |
dc.citation.number | 8 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | sci | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.identifier.url | https://aip.scitation.org/doi/10.1063/1.3482940 | - |
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