Synthesis of Transition Metal Disulfides with Liquid Ammonium Sulfide as a Reliable Sulfur Precursor
- Authors
- Choi, Soo Ho; Oh, Chang Seok; Boandoh, Stephen; Yang, Woochul; Kim, Soo Min; Kim, Ki Kang
- Issue Date
- May-2019
- Publisher
- 한국진공학회
- Citation
- Applied Science and Convergence Technology, v.28, no.3, pp 60 - 65
- Pages
- 6
- Journal Title
- Applied Science and Convergence Technology
- Volume
- 28
- Number
- 3
- Start Page
- 60
- End Page
- 65
- URI
- https://scholarworks.sookmyung.ac.kr/handle/2021.sw.sookmyung/806
- DOI
- 10.5757/asct.2019.28.3.60
- ISSN
- 2288-6559
2288-6559
- Abstract
- We introduce liquid ammonium sulfide as a reliable and carbon-free sulfur precursor for synthesizing large-area transition metal disulfides (TMdS) in chemical vapor deposition. The flux of sulfur during TMdS growth is precisely controlled by passing a known amount of carrier gas through a bubbling system containing liquid ammonium sulfide. However, controlling the flux of sulfur through the conventional evaporation of sulfur powder using a heating belt remains a challenge. By achieving controllability of sulfur flux, we study growth kinetics such as nucleation density and growth rate. Furthermore, the continuous supply of the sulfur precursor results in the growth of a large-area monolayer and a few layers of MoS2 film. In addition, we present the feasibility of ammonium sulfide as an effective and clean precursor for the growth of a wide range of TMdS, thus enabling it to serve as a universal sulfur precursor.
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