Flader, Ian B.; Chen, Yunhan; Yang, Yushi; Ng, Eldwin J.; Shin, Dongsuk D.; Heinz, David B.; Ortiz, Lizmarie Comenencia; Alter, Anne L.; Park, Woosung; Goodson, Kenneth E., et al.
ArticleIssue Date2019CitationJOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.28, no.3, pp 372 - 381PublisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC