High temperature electrical conduction in nanoscale hafnia films under varying oxygen partial pressure
- Authors
- Ko, C (Ko, Changhyun); Shandalov, M (Shandalov, Micha; McIntyre, PC (McIntyre, Paul C; Ramanathan, S (Ramanathan, Shr
- Issue Date
- Aug-2010
- Publisher
- American Institute of Physics
- Citation
- APPLIED PHYSICS LETTERS, v.97, no.8
- Journal Title
- APPLIED PHYSICS LETTERS
- Volume
- 97
- Number
- 8
- URI
- https://scholarworks.sookmyung.ac.kr/handle/2020.sw.sookmyung/147899
- DOI
- 10.1063/1.3482940
- ISSN
- 0003-6951
1077-3118
- Abstract
- Point defect equilibration in nanocrystalline hafnium oxide thin films in the monoclinic (m-HfO(2)) phase was studied by electrochemical measurements performed under varying temperature and oxygen partial pressure (P(O2)) on films of 35-63 nm thickness on single crystal MgO and Al(2)O(3) substrates. The conductance varied as (P(O2))(n), where n is the in the range similar to+1/11 to similar to+1/14, at high P(O2). The increasing conductance with P(O2) suggests that the electronic conduction in the HfO(2) films is p-type and oxygen interstitials or hafnium vacancies, rather than oxygen vacancies, could be dominant charged point defects in nanocrystalline, undoped m-HfO(2) films. (C) 2010 American Institute of Physics. [doi: 10.1063/1.3482940]
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